Original document(68 pages)  中文版
    It is made possible to control the effective work function of the gate electrode so that the transistor can have an optimum operating threshold voltage. A semiconductor device includes: a semiconductor substrate; a gate insulating film provided on the semiconductor substrate; a gate electrode provided on the gate insulating film; source/drain regions provided in the semiconductor substrate on both sides of the gate electrode; and a layer which is provided at an interface between the gate electrode and the gate insulating film, and contains an element having an electronegativity different from those of elements constituting the gate electrode and the gate insulating film.
Application Number
申请号
200610151892 Application Date
申请日
2006.09.13
Title 名称 Semiconductor device
Publication Number
公开号
1933180 Publication Date
公开日
2007.03.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L29/78;H01L29/49
Applicant(s) Name
申请人
Tokyo Shibaura Electric Co.
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 zhanggao
More information 更  多  信  息


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