| Original document(11 pages) 中文版 |
A method for preparing vibration diaphragm chip of silicon microphone includes defining disengagement layer being able to be dissolved in preset etching solution on base plate and defining isolation block layer and vibration diaphragm layer upwards in sequence then evaporating out seed crystal film as seed by utilizing conductor material on vibration diaphragm layer, using polymer to define out sacrifice layer covering relevant region on vibration layer and exposing partial seed crystal film, forming ring wall and etching off sacrifice layer to form vibration diaphragm chip then corroding off disengagement layer. |
Application Number
申请号 |
200510099338 |
Application Date
申请日 |
2005.09.14 |
| Title 名称 |
Vibrating diaphragm chip of silicon microphone and producing method thereof |
Publication Number
公开号 |
1933682 |
Publication Date
公开日 |
2007.03.21 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
H04R31/00;H04R19/01 |
Applicant(s) Name
申请人 |
Jiale Electronic Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
dinghui min |
| More information 更 多 信 息 |
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