Original document(32 pages)  中文版
    A method for forming a carbonaceous material protruding structure, which includes a process of coating a diamond board (10) with a resist (11), a process of opening a hole (12) on the resist (11) applied and processing a wall (12b) of the hole (12) to reversely taper it from an opening part (12a) to a bottom side, a process of depositing a mask material from the side of the opening part (12a) and forming a mask deposit (14) inside the hole (12), a process of lifting off the mask material (13) deposited on the resist (11) with the resist (11), and a process of etching the diamond board (10) using the mask deposit (14) as a mask and forming a carbonaceous material protrusion.
Application Number
申请号
200580009107 Application Date
申请日
2005.03.24
Title 名称 Method for forming carbonaceous material protrusion and carbonaceous material protrusion
Publication Number
公开号
1934671 Publication Date
公开日
2007.03.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01J9/02;B82B3/00;G01N13/16;H01J1/304
Applicant(s) Name
申请人
Sumitomo Electric Industries
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 lixiang lan
More information 更  多  信  息


 Related patents information
Electronic tansmitting element
Diamond-based light emitting element and its method of fabrication
N-type semiconductor diamond producing method and semiconductor diamond
Diamond electron emitter and electron beam source using same
Process for producing n-type semiconductor diamond and n-type semiconductor diamond
Diamond n-type semiconductor, manufacturing method thereof, semiconductor element, and electron emitting element
Google
Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.