| Original document(23 pages) 中文版 |
An ion beam irradiation apparatus is provided with a vacuum container (10), an ion source (2), a board driving mechanism (30), a rotating shaft (14), an arm (12) and a motor. The ion source (2) is provided in the vacuum container (10) and irradiates a board (6) with an ion beam (4) having a width wider than that of the board. The board driving mechanism (30) drives the board (6) to reciprocate in the vacuum container (10). The rotating shaft (14) has a center shaft (14a) separated from the ion source (2) but close to the board and is substantially parallel to the board surface. The arm (12) is provided in the vacuum container (10) and supports the ion source (2) from the rotating shaft (14). The motor is provided outside the vacuum container (10) and reciprocates and rotates the rotating shaft (14). |
Application Number
申请号 |
200580009119 |
Application Date
申请日 |
2005.08.31 |
| Title 名称 |
Ion beam irradiation apparatus and ion beam irradiation method |
Publication Number
公开号 |
1934674 |
Publication Date
公开日 |
2007.03.21 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
H01J37/317;G02F1/1337 |
Applicant(s) Name
申请人 |
Nissin Ion Equipment Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
lujin hua |
| More information 更 多 信 息 |
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