Original document(19 pages)  中文版
    In a displacement detection device having an IC chip for a regulation plate, silicon broken pieces might drop from loose chippings during assembling or using the device and affect properties of the displacement detection device. By setting an angle of grinding traces on an IC chip wafer of chip with a vertical line on side ridges of the IC chip to less than 45 degrees, more preferably 10 to 45 degrees, the chippings including loose chippings can be reduced on the side ridges of the IC chip. Using of an IC chip having loose chippings on side ridges for a regulation plate can be avoided, and a highly reliable displacement detection device can be provided.
Application Number
申请号
200610154224 Application Date
申请日
2006.09.15
Title 名称 Displacement detection device
Publication Number
公开号
1936591 Publication Date
公开日
2007.03.28
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G01P15/12;H01L29/84;B81B7/02
Applicant(s) Name
申请人
Hitachi Metals Ltd.
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 kangjian zhong
More information 更  多  信  息


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