Original document(26 pages)  中文版
    Yet, as a consequence of a recent scaling-up of the probe card 4 causing its weight to increase, for example, to 15-25 kg, a lot of strength is needed to raise, move, and arrage the probe card 4 from the transfer vehicle to the card carrying mechanism. Furthermore, in case of lifting the probe card 4 only with hands, the grip portions are limited, thereby giving the operator an enormous amount of burden in the process. The probe card transfer assist apparatus includes a holder for holding the probe card; an arm provided on the front end for making the holder extensible and contractible; a support for supporting the holder in a freely-rotate manner; and an elevation unit for moving the probe card up and down via the support.
Application Number
申请号
200610139281 Application Date
申请日
2006.09.20
Title 名称 Probe card transfer assist apparatus, and inspection equipment and method using same
Publication Number
公开号
1936594 Publication Date
公开日
2007.03.28
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G01R1/02;G01R1/067;G01R1/073;G01R31/00;H01L21/66
Applicant(s) Name
申请人
Tokyo Electron Ltd.
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 longchun
More information 更  多  信  息


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