Yet, as a consequence of a recent scaling-up of the probe card 4 causing its weight to increase, for example, to 15-25 kg, a lot of strength is needed to raise, move, and arrage the probe card 4 from the transfer vehicle to the card carrying mechanism. Furthermore, in case of lifting the probe card 4 only with hands, the grip portions are limited, thereby giving the operator an enormous amount of burden in the process. The probe card transfer assist apparatus includes a holder for holding the probe card; an arm provided on the front end for making the holder extensible and contractible; a support for supporting the holder in a freely-rotate manner; and an elevation unit for moving the probe card up and down via the support. |