| Original document(92 pages) 中文版 |
A vacuum chuck is provided for attaining uniform polishing of an object to be sucked. The vacuum chuck is provided by integrating a suction layer and a compact substance layer, which are formed of a porous ceramics, and positioning the suction layer on a side of sucking the object to be sucked. The vacuum chuck is provided with a suction board for sucking and holding the object to be sucked. The compact substance layer is formed by impregnating the porous ceramics with a metal. |
Application Number
申请号 |
200580009675 |
Application Date
申请日 |
2005.03.25 |
| Title 名称 |
Vacuum chuck and suction board |
Publication Number
公开号 |
1938122 |
Publication Date
公开日 |
2007.03.28 |
| Approval Pub. Date |
|
Granted Pub. Date |
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| International Classification 分类号 |
B23Q3/08;B24B37/04;B24B41/06;H01L21/304 |
Applicant(s) Name
申请人 |
Ibiden Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
chenjian |
| More information 更 多 信 息 |
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