Original document(20 pages)  中文版
    To prevent generation of scratches due to dropping of abrasive grains by stably and firmly fixing the grains, in a CMP conditioner whereupon the abrasive grains are firmly fixed on a protruding part on a base material upper plane, and to ensure a space for holding a grinding liquid between a protruding edge plane of the protruding part on the circumference of the abrasive grain and a pad, at the time of dressing. The CMP conditioner is provided by forming the protruding parts (3, 4), which protrude from the upper plane (2) of the base material (1) rotating in an axis line rotating direction on the upper plane (2), and firmly fixing a plurality of grinding grains (5) on the protruding parts (3, 4). The grinding grains (5) are firmly fixed on the protruding edge planes (3A, 4A) facing the protruding direction of the protruding parts (3,4), so as not to be protruded from a virtual extension plane (P) extended in the axis line direction from circumferences (3C, 4C) of the protruding planes (3A, 4A).
Application Number
申请号
200580009991 Application Date
申请日
2005.03.29
Title 名称 CMP conditioner
Publication Number
公开号
1938128 Publication Date
公开日
2007.03.28
Approval Pub. Date Granted Pub. Date
International Classification 分类号 B24B53/12;H01L21/304
Applicant(s) Name
申请人
Mitsubishi Materials Corp.
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 ligui liang
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