Original document(31 pages)  中文版
    A microlithographic projection exposure apparatus includes a projection lens (20) that is configured for immersion operation. For this purpose an immersion liquid (34) is introduced into an immersion space (44) that is located between a last lens (L5; 54) of the projection lens (20) on the image side and a photosensitive layer (26) to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid (34), the projection exposure apparatus (10) includes heat transfer elements (50; 501; 502; 503; 504) with which zones of the immersion liquid (34) can be heated or cooled in a specified manner.
Application Number
申请号
200580002853 Application Date
申请日
2005.01.13
Title 名称 Microlithographic projection exposure apparatus and measuring device for a projection lens
Publication Number
公开号
1938646 Publication Date
公开日
2007.03.28
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G03F7/20
Applicant(s) Name
申请人
Zeiss Carl Smt AG
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 wupeng majiang li
More information 更  多  信  息


 Related patents information
Google
Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.