Original document(17 pages)  中文版
    A system and method for patterning a master disk or 'stamper' to be used for nanoimprinting magnetic recording disks uses an air-bearing slider that supports an aperture structure within the optical near-field of a resist layer on a rotating master disk substrate. Laser pulses directed to the input side of the aperture are output to the resist layer. The aperture structure includes a metal film reflective to the laser radiation with the aperture formed in it. The aperture has a size less than the wavelength of the incident laser radiation and is maintained by the air-bearing slider near the resist layer to within the radiation wavelength. The timing of the laser pulses is controlled to form a pattern of exposed regions in the resist layer, with this pattern ultimately resulting in the desired pattern of data islands and nondata islands in the magnetic recording disks when they are nanoimprinted by the master disk.
Application Number
申请号
200610159221 Application Date
申请日
2006.09.22
Title 名称 System and method for patterning a master disk for nanoimprinting patterned magnetic recording disks
Publication Number
公开号
1941093 Publication Date
公开日
2007.04.04
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G11B5/84;G11B5/86;G03F7/20
Applicant(s) Name
申请人
Hitachi Global Storage Tech
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 zhangbei
More information 更  多  信  息


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